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Quartzware size : Up to for 300mm quartzwares Quartzware type : Inner/Outer tube, Boat, Pedestal,.. Application chemical :HF, HNO3,... 2PVDF cleaning chambers 2Chemical mixing tank with recirculation function Nozzle : Top, Bottom, Side, Flexible,... Rotary top-side jet nozzles Transparency door with DIW cleaning & N2 purge Ph meter installation N2 heater for quartz and chamber drying T/C cleaning function with end-cap
V-Tube washer
